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Used system in South Korea

1983 CANON ANELVA ILD-4002
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
2008 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1983 CANON ANELVA ILD-4002
- Manufacturer: Anelva
Dry etching system (ILD-4002)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4003T
- Manufacturer: Anelva
Dry etching system (ILD-4002)
Yongin-si, South Korea
1983 CANON ANELVA ILD-4002
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4003T
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1985 CANON ANELVA ILD-4003M
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
2011 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1995 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4032
- Manufacturer: Anelva
Dry etching system (Mo)
Yongin-si, South Korea
1985 CANON ANELVA ILD-4003M
- Manufacturer: Anelva
Dry etching system (ILD-4003M)
Yongin-si, South Korea
1995 CANON ANELVA ILD-4033
- Manufacturer: Anelva
Dry etching system (ILD-4033)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4032
- Manufacturer: Anelva
Dry etching system (ILD-4032)
Yongin-si, South Korea
1984 CANON ANELVA ILD-4002
- Manufacturer: Anelva
Dry etching system (Poly Si)
Yongin-si, South Korea
CANON-ANELVA ILD-4100
- Manufacturer: Anelva
- Model: ILD-4100
W Etcher
Yongin-si, South Korea

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