Used Lithography (Photolithography)

TEL Act 12

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

TRACK, UNITY, C4 HIGH TPT PROCESS

TEL ACT 12

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

STAND ALONE TRACK, CU

DNS / DAINIPPON SK-80BW-AVPF (2) Coater / (2) Developer system, 6"

• Manufacturer: Dainippon Screen
• Model: SK-80BW-AVPF

DNS / DAINIPPON SK-80BW-AVPF (2) Coater / (2) Developer system, 6" (4) Load ports (4) LH Units (4) Chill plates (10) Hot plates EEW Unit (4) Resist dispense lines (4) IDI 400 Series pumps

Heidelberg DWL 200

• Manufacturer: Heidelberg

Heidelberg DWL 200 G-line Laser writer with 0.8 µm spot size Up to 8″ round or square substrates with thickness up to 1 cm Direct write on uneven substrates up to 100 µm variation in flatness 6 bits grayscale wri...

Complete photolitographic line FALCON

• Manufacturer: Nikon

Complete photolitographic line FALCON

248nm KrF Scanner

• Manufacturer: Canon

Status: System is currently de-installed by the OEM (April 2014). The entire system is stored in climate controlled warehouse. 2 crates are opened to remove parts: && Crate#3 (Rect Cassette Robot) && Crate#8 (las...

Immersion Scanner

• Manufacturer: Nikon

The tool is still running and is in-service in the Fab

DNS SK-80BW-AVQE

• Manufacturer: Dainippon Screen
• Model: SK-80

DNS SK-80BW-AVQE

Tokyo Electron ACT 8 2C2D DUV E beam process

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Application: 200mm wafers for I-line, DUV, E-beam resist processes. Purchased in 2010 but the Track was never used. We have detailed configuration. Currrently installed. CSI Semi can provide de-installation and r...

ASML 200 quipement semi-conducteur semiconductor equipment used

• Manufacturer: ASML

DNS SK-80BW-AVPQE

• Manufacturer: Dainippon Screen
• Model: SK-80BW-AVPQE

DNS SK-80BW-AVPQE

DNS SK-80BW-AP

• Manufacturer: Dainippon Screen
• Model: SK-80

DNS SK-80BW-AP

ASML Twinscan XT 1700I

• Manufacturer: ASML

This is located in Japan Some parts are removed Please send your email to : for a price and inspection.

TEL Act 8 Clean Track Low/High Temperature Hot Plate 3-13

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Model No. 813 Height Mtrs .24 Mtrs Width Mtrs .33 Mtrs Depth Mtrs .50 Mtrs Shipping Volume M³ .04 M³ Gross Shipping Weight Kgs 15.00 Kgs

Beta Squared Model OS2000 Micralign Mask Scanner (non contact)

• Manufacturer: Beta Squared / Perkin Elmer

Beta Squared Model OS2000 Micralign Mask Scanner (non contact) Projection Mask Scanner, Lithography Upgraded to non contact This tool started life as a 100 mm (4” tool) and remains as such, though it was customiz...