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Used Etching Systems in Gyeonggi-do, South Korea

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    1994 Yokogawa Electric Rainbow-4500

    • Manufacturer: Yokogawa

    Dry etching system (R-4500)

    Yongin-si, South Korea
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    1998 Yokogawa Electric Rainbow-4420

    • Manufacturer: Yokogawa

    Dry etching system (R-4420)

    Yongin-si, South Korea
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    1989 CANON ANELVA ILD-4032

    • Manufacturer: Anelva

    Dry etching system (ILD-4032)

    Yongin-si, South Korea
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    1992 Applied Materials P-5020E

    • Manufacturer: Amat

    Dry etching system (Poly Si)

    Yongin-si, South Korea
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    1984 CANON ANELVA ILD-4002

    • Manufacturer: Anelva

    Dry etching system (Poly Si)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2/CF4 treatment)

    Yongin-si, South Korea
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    CANON-ANELVA ILD-4100

    • Manufacturer: Anelva
    • Model: ILD-4100

    W Etcher

    Yongin-si, South Korea
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    CANON-ANELVA I-4100 SVII

    • Manufacturer: Anelva

    W Etcher

    Yongin-si, South Korea
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    2000 TEL TE8500P

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(1CH), some parts missing Wafer size: 200mm

    Yongin-si, South Korea
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    LAM VERSYS KIYO 1X1

    • Manufacturer: Lam Research - Novellus

    METAL ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    Hitachi M-501

    • Manufacturer: Hitachi
    • Model: M-501

    RIE (AL-Si/TiW)

    Yongin-si, South Korea
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    Branson L3100

    • Manufacturer: Branson
    • Model: L3100

    Asher

    Yongin-si, South Korea
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    1989 Ramco Ram-250HAS

    • Manufacturer: Ramco

    Wafer size: 150mm

    Yongin-si, South Korea
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    Gasonics PEP 3510

    • Manufacturer: GaSonics
    • Model: PEP 3510

    Asher

    Yongin-si, South Korea
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    1996 TEL TE-5000ATC

    • Manufacturer: Tokyo Electron - TEL

    Oxide Etcher Wafer size: 125mm/150mm

    Yongin-si, South Korea
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