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Used Etching Systems in Gyeonggi-do, South Korea

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    TEL TE 5480

    • Manufacturer: Tokyo Electron - TEL

    Plasma Reactive Ion Etch System

    Yongin-si, South Korea
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    1999 Applied Materials P-5040E

    • Manufacturer: Amat

    Dry etching system (Si trench)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2 treatment)

    Yongin-si, South Korea
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    1995 Yokogawa Electric Rainbow-4500

    • Manufacturer: Yokogawa

    Dry etching system (R-4500)

    Yongin-si, South Korea
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    1983 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2/CF4 treatment)

    Yongin-si, South Korea
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    LAM 4500

    • Manufacturer: Lam Research - Novellus
    • Model: 4500

    Etch

    Yongin-si, South Korea
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    TEL TE-8401

    • Manufacturer: Tokyo Electron - TEL

    Etch

    Yongin-si, South Korea
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    AMAT DPS Ⅱ

    • Manufacturer: Amat
    • Model: DPS

    Poly Etch Wafer size: 300mm

    Yongin-si, South Korea
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    2006 AMAT DPSII AE Poly G3

    • Manufacturer: Amat

    POLY ETCH Wafer size: 300

    Yongin-si, South Korea
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    2006 LAM DV-38DS

    • Manufacturer: Lam Research - Novellus

    Single Wet ETCH Wafer size: 12INCH

    Yongin-si, South Korea
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    LAM EXELAN

    • Manufacturer: Lam Research - Novellus
    • Model: EXELAN

    Flex OXIDE ETCH Wafer size: 12"

    Yongin-si, South Korea
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    FSI EXC 2000

    • Manufacturer: FSI

    HF vapor etch

    Yongin-si, South Korea
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    2007 AMAT DPSII AE poly G3

    • Manufacturer: Amat

    POLY ETCH Part Machine Wafer size: 300

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • Manufacturer: Tokyo Electron - TEL

    Poly Etch, 1 IEM CH, Ebara pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    1985 CANON ANELVA ILD-4003M

    • Manufacturer: Anelva

    Dry etching system (SiO2)

    Yongin-si, South Korea
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