Used Mass Flow Controllers in Tokyo, Japan

Aera FC-770AC

Flow rate: 200 SCCM Gas: AR Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-RC

Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas:SiH4 Flow rate:100SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:300SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-K

Gas:N2O Flow:2LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410-UC

Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK2

Gas: CF4 Flow: 500 CCM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas:N2 Flow rate:5LM Device name: Mass flow controller (MFC)

Aera FC-780C

Flow rate: 5SCCM Gas: O2 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-310

• Manufacturer: Horiba

Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)