Used Lithography (Photolithography)

Tokyo Electron TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

TEL ACT12-300 Dual Block Track

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Recently powered off and still in the clean room and waiting for fixture for deinstall and rigging and crating. Tool type: dual process block track Wafer size: 300mm Direction: right hand side 4 blocks interf...

Solitec FlexiFab Coater / Developer

• used

• Manufacturer: Solitec

- Model Flexifab - Currently set up for 6" Wafers - Automated Wafer Handling - Coater Module - Developer Module - Hotplate Module - Cybor Control Module & Power Supply - More Details Can be Found Here: htt...

DNS SC-W80A-W/AVF SOG Coater

• used

• Manufacturer: Dainippon Screen

SOG Spin Coat L Configuration - Load on the Left, Cure Furnace on the Right 25 Slot Cassette Oven type: (4) HP (2) 80C (2) 160C (2) CP 23C (2) HH 250C Refurbished by OEM in 2015, installed by OEM, only u...

Air Control Inc. Custom Laminar Flow Fume Hood

• used

• Manufacturer: AIR CONTROL

Air Control Inc. Custom Laminar Flow Fume Hood

1999 TEL Mark 8 2C Polyamide Coater

• used

• Manufacturer: Tokyo Electron - TEL

- Standalone - 2xCoater (Polyamide) - Single Block(CRB, PRB) - Two coater cups (2-1, 2-2). One polyimide nozzle per coater. Note from the fab: "We upgraded pumps on this tool but unfortunately we will be keeping...

2002 TEL Act 8 Coater / Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

- 3 Coater - 1 Developer Wafer Size: 4"

TEL Act12 Dual Block

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Manufacturer: TEL ACT12-300 Dual Block Track Tool Type: Dual Process Block Track Model: ACT12-300 Wafer Size: 300mm Direction: RIGHT HAND SIDE 4 Blocks Interfaced; Cassette, 2 Process, & Stepper Interface 4...

TEL ACT 12

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Recently powered off and still in the clean room and waiting for fixture for deinstall and rigging and crating. ➢ Manufacturer: Tokyo Electron ➢ Tool Type: Slam stand-alone Track ➢ Model: ACT 12 ➢ Wafer Size:...

2001 Ultratech XLS200 Stepper

• used

• Manufacturer: Ultratech

Ultratch XLS200 for sale Parts tool Can sell each part seperatly or all togther, See pictures. Priced to sell quickly Contact us for More info and a quotation

Karl Suss MA25 Mask Aligner

• used

• Manufacturer: SÜSS MicroTec
• Model: MA25

Karl Suss MA25 Mask Aligner Download the Spec Sheet below. Karl Suss MA25 mask aligner configured for simultaneous double side exposure and manual operation of wafers with a maximum wafer diameter of 5" and max...

Brewer Science / CEE 200 Spin Coater

• used

• Manufacturer: Brewer Science

Brewer Science / CEE 200 Spin Coater consisting of:- Up to 200mm Capable - 110-125V, 1 Phase, 50/60Hz, 15amp- SN: 2073151 - Chuck