Used in Gyeonggi-do, South Korea

ECI Technology Qualilab QL-5EX

• Manufacturer: ECI Technology
• Model: QUALILAB QL-5EX

Wafer size: n/a

Eriez Manufacturing Co. 6 In.Spec HCMS

• Manufacturer: Eriez

Electroplating Engineers of Japan, Ltd (EEJA) CUP-Plater

• Manufacturer: Electroplating Engineers of Japan, Ltd (EEJA)

Excellon ATI 105-DP

• Manufacturer: Excellon

Wafer size: n/a

FEI Company DualBeam Expida 1265

• Manufacturer: FEI
• Model: DUALBEAM EXPIDA 1265

Wafer size: 12"

Fluoroware Inc. HTC 8030

• Manufacturer: Fluoroware Inc.

Wafer size: n/a

FEI Company Strata DB 235

• Manufacturer: FEI
• Model: STRATA DB 235

Wafer size: 12"

Hitachi Kokusai Electric Inc. Aldinna

• Manufacturer: Hitachi
• Model: ALDINNA

Furnace Wafer size: 12"

Hitachi Kokusai Electric Inc. Aldinna

• Manufacturer: Hitachi
• Model: ALDINNA

Furnace Wafer size: 12"

Hitachi Kokusai Electric Inc. Quixace

• Manufacturer: Hitachi
• Model: QUIXACE

Furnace Wafer size: 12"

JPSA Laser Chromadice LX-300 DPSS

• Manufacturer: JPSA

Wafer size: 6"

AMAT COMPASS PRO 200

• Manufacturer: Amat
• Model: COMPASS PRO 200

Defect Inspection

KLA Tencor KLA Surfscan SP1 TB1

• Manufacturer: KLA-Tencor
• Model: Surfscan SP1

Bare Wafer Inspection

AMAT DR SEMVision Cx

• Manufacturer: Amat
• Model: Semvision

SEMIVISION cX Defect review Sys including Color MPSI for Enchanced Topography & Material Information

KLA Tencor UV-1050

• Manufacturer: KLA-Tencor
• Model: UV-1050

Fully automated measurement module, automated wafer handling / Windows NT user interface / 2 cassette loader for 1 specific wafer size