Building Filters
2006 KLA TENCOR CS20
used
- Manufacturer: KLA-Tencor
- Model: CS20
[ General Description ] [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (S...
Cheonan-si, South Korea
2005 KLA TENCOR OSA6100
used
- Manufacturer: KLA-Tencor
[ General Description ] [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) [ Application ] - Disk substrates
Cheonan-si, South Korea
2006 KLA TENCOR OSA6100
used
- Manufacturer: KLA-Tencor
[ General Description ] [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) [ Application ] - Disk substrates
Cheonan-si, South Korea
2005 N&K 1700RT
used
- Manufacturer: N&K
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. The n&k 1700-RT is designed for handling 5” or 6” square masks. The n&k 1700-RT simultaneously determines thickness...
Cheonan-si, South Korea
2010 SDI/SEMILAB MCV2500
used
- Manufacturer: Semilab
■ Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Drive Signal Frequency at 1Mhz voltage=15mV rms ■ CDA: 8...
Cheonan-si, South Korea
2001 SOLID STATE MEASRUEMENT INC. SSM495
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 8" Wafer ■ SSM 42 Capacitance Measurement Unit ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Drive Signal Frequency at 1Mhz voltage=15mV rms ■ CDA: 80...
Cheonan-si, South Korea
2004 SOLID STATE MEASRUEMENT INC. SSM5130
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Auto wafer handling (Genmark robot & pre aligner) ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Driv...
Cheonan-si, South Korea
2008 SOLID STATE MEASRUEMENT INC. SSM530
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Drive Signal Frequency at 1Mhz voltage=15mV rms ■ CDA: 8...
Cheonan-si, South Korea
N&K N&K 1700
used
- Manufacturer: N&K
*. Film Thickness and Trench profile measurement. *. Manual load Metrology system. *. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, r...
Cheonan-si, South Korea
2006 N&K NK5300
used
- Manufacturer: N&K
Fully Automated Thin Film Metrology System for Patterned and Unpatterned Wafers Cognex Pattern Recognition Software n&k's Thin Film Characterization S/W n&k's Standard Films Library Automated Wafer Loading/Unload...
Cheonan-si, South Korea
1996 NANOMETRICS 2100
used
- Manufacturer: Nanometrics
- silicon dioxide on silicon 400~ 30,000 A. - photo resist on silicon 500~ 40,000 A. - other thin films. *. Hardware configuration: - Optical microscope & objectives 5x,10x,40x. - Spectrophotometer Head. - Microc...
Cheonan-si, South Korea
NANOMETRICS 210
used
- Manufacturer: Nanometrics
- Model: 210
- silicon dioxide on silicon 400~ 30,000 A. - photo resist on silicon 500~ 40,000 A. - other thin films. *. Hardware configuration: - Optical microscope & objectives 5x,10x,40x. - Spectrophotometer Head. - Microc...
Cheonan-si, South Korea
1995 KLA TENCOR P-10
used
- Manufacturer: KLA-Tencor
- Model: P-10
- Standard Head with L(yellow) type stylus. - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Installed in Clean-room.
Cheonan-si, South Korea
1996 KLA TENCOR P-12
used
- Manufacturer: KLA-Tencor
- Model: P-12
P12 Long Scan Profiler (Step Height Measurement) - 8" chuck - Micro Head II with L type stylus (Red 12.5 um). - Motorized X-Y stage - Installed in Clean-room.
Cheonan-si, South Korea
1997 KLA TENCOR P-11
used
- Manufacturer: KLA-Tencor
- Model: P-11
- Long Scan Profiler P-11 Measurement. - Micro Head sr with Orange stylus. - Pentium 233MHz, Ram 31MB & 17" LCD Color Monitor, Windows 3.1. - Installed in Clean-room.
Cheonan-si, South Korea