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Used parallel robots

  • GaSonics PEP 3510A/A Dual Chamber

    GaSonics PEP 3510A/A Dual Chamber

    • used

    • Manufacturer: GaSonics

    The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating res...

    San Jose, CA
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    StripperAsher

    • used

    • Manufacturer: Unknown

    System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...

    Bree, Ireland