Used Deposition Equipment (Cvd, Pvd)

AMAT Centura CVD 8 WxZ Optima

• Manufacturer: Amat
• Model: Centura

AMAT Centura CVD 8″ WxZ Optima

AMAT Centura CVD 8 WxZ Optima

• Manufacturer: Amat
• Model: Centura

AMAT Centura CVD 8″ WxZ Optima

AMAT Centura CVD 8 WxZ Optima

• Manufacturer: Amat
• Model: Centura

AMAT Centura CVD 8″ WxZ Optima

AMAT Centura CVD 8 WxZ Optima

• Manufacturer: Amat
• Model: Centura

AMAT Centura CVD 8″ WxZ Optima

AMAT P5000 CVD 8 Nitride

• Manufacturer: Amat
• Model: P5000

AMAT P5000 CVD 8″ Nitride

300mm Metal CVD TEL TRIAS

• Manufacturer: Unknown

300mm Metal CVD – TEL ‘TRIAS ‘

PECVD Chemical Vapor Deposition

• Manufacturer: Unknown

Tool was shut-down in Apr., 2014 and is still in clean room. [Chamber A] Process: P-TEOS Hard: CVD Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300) RPU: 400kHz/3000W HRF: 13.56MHz/...

AMAT P5000 CVD Teos

• Manufacturer: Amat
• Model: P5000

AMAT P5000 CVD Teos

NOVELLUS Concept one 6 CVD

• Manufacturer: Lam Research - Novellus

NOVELLUS Concept one 6″ CVD

Applied Materials AMAT P5000 CVD chamber (not system) 150mm

• Manufacturer: Amat
• Model: P5000

Seperated from system, used, needs refurbishment

AMAT Endura2 CVD Co Chambers VOLTA 300mm

• Manufacturer: Amat
• Model: Endura

ECD Electro Chemical Deposition

• Manufacturer: Unknown

ALD Atomic Layer Deposition

• Manufacturer: Unknown

•300mm •Dual FOUP •2007 Vintage •N2 purged Load area oOxygen sensor •Fast ramp heating element o5 point cascade thermocouple •In-situ gas clean •Ionizer •RFID reader •SECS/GEM

Alcatel PVD Sputtering Ta Ta205 HfO2

• Manufacturer: Alcatel-Lucent

Alcatel PVD Sputtering (Ta, Ta205, HfO2) PVD Sputtering (Ta, Ta205, HfO2)

AMAT Centura CVD HDP 8 1997 DXZ AND ULTIMA

• Manufacturer: Amat
• Model: Centura

AMAT Centura CVD HDP 8″ 1997 DXZ AND ULTIMA