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SDI/SEMILAB FAaST 230
- Manufacturer: Semilab
- Model: FAAST 230
. Up to 8" . Automatic robotic wafer handling . Single open-cassette wafer loading station . Measurement of dielectric and interface properties on monitor wafer - Dielectric Capacitance (CD) and Thickness (EOT) -...
Cheonan-si, South KoreaAPPLIED MATERIALS AMC 7700
- Manufacturer: Amat
*. Operational at the time of de-installation,To be refurbished *. Wafer Size - 100mm(4") ~ 150mm(6") *. Reactor system configuration: - Staubli Robot - Lift & Roation Assembly - Process chamber Assembly - Lower...
Cheonan-si, South Korea