Building Filters
TSK APM90A
TSK APM90 Spec Sheet Accuracy within 5 Microns / 0.2 mil (± 2.5 microns) Wafer Size 4,5, 6, and 8 inch Maximum X/Y Speed 200 mm (8″) / sec. Z Stage/Chuck Range 1.36″ Speed 35 ms/0.020″ stroke Rotation ± 5º Loader...
Sherwood, ORTSK APM90A G2
APM90 G2 Spec Sheet Accuracy within 5 Microns / 0.2 mil (± 2.5 microns) Wafer Size 4,5, 6, and 8 inch Maximum X/Y Speed 200 mm (8″) / sec. UF200 Processor Z Stage/Chuck Range 1.36″ Speed 35 ms/0.020″ stroke Rota...
Sherwood, ORTSK UF200
- Manufacturer: Accretech - Tokyo Seimitsu - TSK
- Model: UF200
TSK UF200 Spec Sheet Overall Accuracy Within 4µm Wafer Size 5″, 6″, 8″ X/Y Axes Probing Area Maximum Speed ±120mm 200mm/s Z axis Full Stroke Maximum Speed 69mm 35ms/0.5mm Stroke 0 axis Rotation Range ±5 dec. Fine...
Sherwood, OR