- Trusted Seller
Mattson Aspen III, Front End Transfer Chamber, Robot, Controller
- Manufacturer: Mattson
Used, parts, Transfer module 12" wafer
United States - Trusted Seller
1993 Gasonics L 3200 Asher, 4", 6"
- Manufacturer: GaSonics
- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and pressure control systems (throttle valves) - Electronics control system - Automated robotic wafer ...
United States - Trusted Seller
2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
- Manufacturer: Ulvac
- Model: Enviro
- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...
United States - Trusted Seller
GASONICS 99-0339 Aura A2000LL Plasma Asher Stripper Novellus A95-205-01 Spare
- Manufacturer: GaSonics
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-205-01, 56-7923 - Asyst Technologies Index...
United States - Trusted Seller
1999 Mattson Aspen II ICP
- Manufacturer: Mattson
Main frame. Cables 64*76*78 AC power rack 26*18*66 Utility box 25*20*75 RF rack 22*26*55 Chiller. Cables 33*25*55 Transformer 24*24*30 Parts box-1 : spare parts, Tool Manual 28*20*16 Parts box-2 : spare pa...
United States - Trusted Seller
GASONICS 99-0339 Plasma Asher Stripper Aura A2000LL Novellus A95-053-02 As-Is
- Manufacturer: GaSonics
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-053-02 - Asyst Technologies Indexer Elevat...
United States - Trusted Seller
Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus
- Manufacturer: Lam Research - Novellus
- Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked Installed Components - Load Lock Chamber Part No: A01-218-01 - Asyst Technologies Indexer Elevator Part No: 0...
United States 
Plasmatherm SLR720 shuttle lock RIE for compound semiconductor etching
- Manufacturer: Plasma-Therm
- Model: SLR-720
Plasmatherm SLR-720 RIE tool Configured for etching of metals and compound semiconductors Previous usage was etching of GaAs with chlorine chemistry PC controller. Vacuum load lock with wafer transfer robot. ...
$75,000 USDSan Jose, CA
Plasmatherm SLR 770 shuttle lock ICP inductively coupled plasma etch system for compound semiconductor process
- Manufacturer: Plasma-Therm
- Model: SLR
Plasmatherm SLR-770 ICP Shuttle Lock Inductively Coupled Plasma Etch System. Configured for etching of metals and compound semiconductors Previous usage was deep etching of GaAs with chlorine chemistry PC cont...
$110,000 USDSan Jose, CA
GaSonics PEP 3510A/A Dual Chamber
- Manufacturer: GaSonics
The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating res...
San Jose, CA
GaSonics L3510 Single Wafer Ashing System
- Manufacturer: GaSonics
The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L35...
San Jose, CA- Trusted Seller
TEL U2e-655II upgraded to U2e-855II Oxide Etcher
- Manufacturer: Tokyo Electron - TEL
TEL U2e-655II upgraded to U2e-855II Oxide Etcher For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration. Configuration: 1) MFC(MASS FLOW CO...
Trim, Ireland - Trusted Seller
Kensington CSMT-4 200mm Wafer Sorter
- Manufacturer: Kensington
Kensington CSMT-4 200mm Wafer Sorter This Kensington CSMT-4 200mm Wafer Sorter is used surplus and is being sold as is. It was uninstalled from a fab in working condition, however, has not been tested since. It i...
Trim, Ireland - Trusted Seller
2005 LAM Rainbow TCP 9600SE II standalone with DSQ - 150mm Plasma Etch
- Manufacturer: Lam Research - Novellus
- Model: TCP 9600SE
LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch Vintage: 2005+/-5j Wafersize: 150mm 200mm convertible: Yes Former BelGaN process: metalpets TECHNICAL SPEC FOR Etch tool System Model: LAM Rainbow...
Europe - Trusted Seller
StripperAsher
- Manufacturer: Unknown
System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...
Bree, Ireland
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