Used Mass Flow Controllers in Japan

Yamatake Mass Flow Controller

Gas O2 Flow 200 SCCM W140 D35 H150 Device name: Mass flow controller

Millipore Mass Flow Controller (MFC)

• Manufacturer: Millipore

He Device name: Mass flow controller (MFC)

Millipore Mass Flow Controller (MFC)

• Manufacturer: Millipore

He Device name: Mass flow controller (MFC)

Millipore Mass Flow Controller (MFC)

SF6 Device name: Mass flow controller (MFC)

Millipore Mass Flow Controller (MFC)

H2 Device name: Mass flow controller (MFC)

Millipore Mass Flow Controller (MFC)

N2 Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas Ar flow rate 200 SCCM Device name: Mass flow controller

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-771C

Gas N2 flow 20SLMW125 D34 H170 Device name: Mass flow controller

Tylan FC-771C

Gas O2 Flow 20SLMW125 D31 H140 Device name: Mass flow controller

Tylan FC-770AC

Gas Ar flow 20 SCCM W120 D32 H125 Device name: Mass flow controller

Tylan FC-260

Gas HCl flow rate 1 SLMW130 D25 H110 Device name: Mass flow controller

Hitachi Metals SFC-480

• Manufacturer: Hitachi Metals

Gas Ar Flow 1000 SCCM W120 D32 H140 Device name: Mass flow controller

Edwards 825

Gas Ar flow rate 50 SCCM W130 D25 H160 Device name: Mass flow controller

Horiba Stec SEC-7440MC

• Manufacturer: Horiba

Gas WF6 Flow 100 SCCM W133 D31 H127 Device name: Mass flow controller