Used Mass Flow Controllers in Tokyo, Japan

Horiba Stec Stec SEC-310

Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400MC

• Manufacturer: Horiba
• Model: SEC-4400MC

Gas: BCI3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3　Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-771C

Gas N2 flow 20SLMW125 D34 H170 Device name: Mass flow controller

Tylan FC-771C

Gas O2 Flow 20SLMW125 D31 H140 Device name: Mass flow controller

Tylan FC-770AC

Gas Ar flow 20 SCCM W120 D32 H125 Device name: Mass flow controller

Tylan FC-260

Gas HCl flow rate 1 SLMW130 D25 H110 Device name: Mass flow controller